{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10473454","patent":{"patent_number":"US-10473454","title":"Imaging-based height measurement based on known geometric information","assignee":null,"inventors":[],"filing_date":"2018-01-04T00:00:00.000Z","publication_date":"2019-11-12T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T"],"num_claims":39,"abstract":"A height mapping system includes a controller configured to generate a height map of a region of interest of a sample with a first optical metrology system having a first numerical aperture, receive images of features having known three-dimensional shapes at selected image plane locations from a second optical metrology system having a second numerical aperture larger than the first numerical aperture, calculate distances between the imaging plane locations and peaks of the features based on in-focus portions of the images and the known three-dimensional shapes, determine distances between the imaging plane locations and a surface of the sample for the features based on the height map, and determine heights of the features by combining the distances between the imaging plane locations and peaks of the features with the distances between the imaging plane locations and the surface of the sample for the one or more features."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Imaging-based height measurement based on known geometric information","description":"A height mapping system includes a controller configured to generate a height map of a region of interest of a sample with a first optical metrology system having a first numerical aperture, receive i","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10473454","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10473454","citation_suggestion":"Patentable. \"Imaging-based height measurement based on known geometric information\" (US-10473454). https://patentable.app/patents/US-10473454","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10473454","json":"https://patentable.app/api/llm-context/US-10473454","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:08:15.361Z"}