{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10473525","patent":{"patent_number":"US-10473525","title":"Spatially resolved optical emission spectroscopy (OES) in plasma processing","assignee":null,"inventors":[],"filing_date":"2017-07-12T00:00:00.000Z","publication_date":"2019-11-12T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":20,"abstract":"Disclosed is a method, system, and apparatus for optical emission measurement. The apparatus includes a collection system for collecting a plasma optical emission spectra through an optical window disposed at a wall of a plasma processing chamber. The optical system includes a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber; and a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Spatially resolved optical emission spectroscopy (OES) in plasma processing","description":"Disclosed is a method, system, and apparatus for optical emission measurement. The apparatus includes a collection system for collecting a plasma optical emission spectra through an optical window dis","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10473525","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10473525","citation_suggestion":"Patentable. \"Spatially resolved optical emission spectroscopy (OES) in plasma processing\" (US-10473525). https://patentable.app/patents/US-10473525","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10473525","json":"https://patentable.app/api/llm-context/US-10473525","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:53:31.615Z"}