{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10473616","patent":{"patent_number":"US-10473616","title":"Backside CMOS compatible BioFET with no plasma induced damage","assignee":null,"inventors":[],"filing_date":"2017-07-14T00:00:00.000Z","publication_date":"2019-11-12T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L"],"num_claims":20,"abstract":"The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a gate structure disposed on a first surface of a substrate and an interface layer formed on a second surface of the substrate. The substrate is thinned from the second surface to expose a channel region before forming the interface layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Backside CMOS compatible BioFET with no plasma induced damage","description":"The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process st","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10473616","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10473616","citation_suggestion":"Patentable. \"Backside CMOS compatible BioFET with no plasma induced damage\" (US-10473616). https://patentable.app/patents/US-10473616","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10473616","json":"https://patentable.app/api/llm-context/US-10473616","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T11:17:18.343Z"}