{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10474133","patent":{"patent_number":"US-10474133","title":"Inspection device for inspecting wafer and method of inspecting wafer using the same","assignee":null,"inventors":[],"filing_date":"2017-10-04T00:00:00.000Z","publication_date":"2019-11-12T00:00:00.000Z","cpc_codes":["G05B","G01N","H01L","H01L","G05B","H01L"],"num_claims":20,"abstract":"An inspection device includes a first processor, a second processor, and a server. The first processor detects first coordinates of first feature points from first images in a first image set. The second processor detects second coordinates of second feature points from second images in a second image set. The server generates reference coordinates based on the first coordinates and the second coordinates. The reference coordinates are transmitted to the first processor and the second processor. The first and second image sets correspond to scanned swaths on a wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection device for inspecting wafer and method of inspecting wafer using the same","description":"An inspection device includes a first processor, a second processor, and a server. The first processor detects first coordinates of first feature points from first images in a first image set. The sec","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10474133","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10474133","citation_suggestion":"Patentable. \"Inspection device for inspecting wafer and method of inspecting wafer using the same\" (US-10474133). https://patentable.app/patents/US-10474133","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10474133","json":"https://patentable.app/api/llm-context/US-10474133","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T22:13:39.511Z"}