{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10474184","patent":{"patent_number":"US-10474184","title":"Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device","assignee":null,"inventors":[],"filing_date":"2017-03-27T00:00:00.000Z","publication_date":"2019-11-12T00:00:00.000Z","cpc_codes":["G06F","G06F","G06F","H02M","H02M","H02M","H02M","H02M"],"num_claims":19,"abstract":"A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device","description":"A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the fi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10474184","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10474184","citation_suggestion":"Patentable. \"Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device\" (US-10474184). https://patentable.app/patents/US-10474184","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10474184","json":"https://patentable.app/api/llm-context/US-10474184","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T04:14:55.813Z"}