{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10480071","patent":{"patent_number":"US-10480071","title":"Continuous distillation trichlorosilane vaporization supply apparatus","assignee":null,"inventors":[],"filing_date":"2014-07-22T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["G05B","H01L","H01L"],"num_claims":4,"abstract":"A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane; and a condenser including a cooling device to condense liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas, wherein a center line of the evaporator and a center line of the condenser are not on the same line, and a lower end of the condenser has a structure that communicates with a lower end of the evaporator through a pipe."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Continuous distillation trichlorosilane vaporization supply apparatus","description":"A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10480071","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10480071","citation_suggestion":"Patentable. \"Continuous distillation trichlorosilane vaporization supply apparatus\" (US-10480071). https://patentable.app/patents/US-10480071","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10480071","json":"https://patentable.app/api/llm-context/US-10480071","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:32:32.495Z"}