{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10481112","patent":{"patent_number":"US-10481112","title":"Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)","assignee":null,"inventors":[],"filing_date":"2018-11-05T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","H01L"],"num_claims":20,"abstract":"Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)","description":"Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterome","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10481112","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10481112","citation_suggestion":"Patentable. \"Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)\" (US-10481112). https://patentable.app/patents/US-10481112","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10481112","json":"https://patentable.app/api/llm-context/US-10481112","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:52:00.409Z"}