{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10481199","patent":{"patent_number":"US-10481199","title":"Data analytics and computational analytics for semiconductor process control","assignee":null,"inventors":[],"filing_date":"2017-12-01T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["G06F","G06F","G06T","G06T","G06F","G06T","G06T"],"num_claims":21,"abstract":"Implementations described herein generally relate to detecting excursions in intended geometric features in an integrated circuit substrate. In one implementation, a method includes determining a set of suspect contours in a design window of the integrated circuit substrate based on proximities of a plurality of points of interest in the design window to intended geometric features. The method further includes obtaining a set of imaged contours from one or more images of a defect-free integrated circuit substrate. The method further includes comparing the set of imaged contours to the set of suspect contours to obtain a set of potential excursions from the imaged contours. The method further includes determining a probability that a potential excursion from the set of potential excursions is a valid excursion. The method further includes taking a corrective action based on the determined probability."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Data analytics and computational analytics for semiconductor process control","description":"Implementations described herein generally relate to detecting excursions in intended geometric features in an integrated circuit substrate. In one implementation, a method includes determining a set ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10481199","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10481199","citation_suggestion":"Patentable. \"Data analytics and computational analytics for semiconductor process control\" (US-10481199). https://patentable.app/patents/US-10481199","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10481199","json":"https://patentable.app/api/llm-context/US-10481199","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:31:46.317Z"}