{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10483137","patent":{"patent_number":"US-10483137","title":"Substrate liquid processing apparatus, substrate liquid processing method, and storage medium","assignee":null,"inventors":[],"filing_date":"2017-07-14T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","G02F","G02F","H01L"],"num_claims":10,"abstract":"The substrate liquid processing apparatus includes a processing bath that accommodates substrates, and a plurality of gas supply pipes provided in a processing bath. Ejection holes of one gas supply pipe and ejection holes of another adjacent gas supply pipe do not overlap each other in a direction parallel to the circuit-formed surfaces of the substrates."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate liquid processing apparatus, substrate liquid processing method, and storage medium","description":"The substrate liquid processing apparatus includes a processing bath that accommodates substrates, and a plurality of gas supply pipes provided in a processing bath. Ejection holes of one gas supply p","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10483137","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10483137","citation_suggestion":"Patentable. \"Substrate liquid processing apparatus, substrate liquid processing method, and storage medium\" (US-10483137). https://patentable.app/patents/US-10483137","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10483137","json":"https://patentable.app/api/llm-context/US-10483137","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:22:36.033Z"}