{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10483139","patent":{"patent_number":"US-10483139","title":"Substrate processing apparatus, method of operating the same and non-transitory storage medium","assignee":null,"inventors":[],"filing_date":"2015-01-16T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":6,"abstract":"The substrate processing apparatus includes a plurality of processing units each capable of performing plural kinds of processes to a substrate under plural kinds of processing conditions, and a substrate transfer mechanism that transfers a substrate to each processing unit. In one embodiment, as an operation mode of each processing unit, a monitoring mode correlated with a processing liquid to be used can be set. When at least one of the processing units is set in the monitoring mode, the substrate transfer mechanism is not uniformly prohibited to load a product substrate to the processing unit set in the monitoring mode, but is allowed to load a product wafer to be subjected to a process correlated with a processing condition, which is different from the processing condition correlated with the monitoring mode, into any one of the at least one processing unit set in the monitoring mode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, method of operating the same and non-transitory storage medium","description":"The substrate processing apparatus includes a plurality of processing units each capable of performing plural kinds of processes to a substrate under plural kinds of processing conditions, and a subst","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10483139","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10483139","citation_suggestion":"Patentable. \"Substrate processing apparatus, method of operating the same and non-transitory storage medium\" (US-10483139). https://patentable.app/patents/US-10483139","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10483139","json":"https://patentable.app/api/llm-context/US-10483139","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:55:43.646Z"}