{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10483153","patent":{"patent_number":"US-10483153","title":"Deep trench isolation structure in semiconductor device","assignee":null,"inventors":[],"filing_date":"2018-01-31T00:00:00.000Z","publication_date":"2019-11-19T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"An integrated circuit includes a semiconductor substrate, an isolation region, a first active component and at least one deep trench isolation structure. The isolation region is in the semiconductor substrate. The first active component is on the semiconductor substrate. The deep trench isolation structure extends from a bottom of the isolation region toward a bottom of the semiconductor substrate. The deep trench isolation structure has at least one air void therein."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Deep trench isolation structure in semiconductor device","description":"An integrated circuit includes a semiconductor substrate, an isolation region, a first active component and at least one deep trench isolation structure. The isolation region is in the semiconductor s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10483153","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10483153","citation_suggestion":"Patentable. \"Deep trench isolation structure in semiconductor device\" (US-10483153). https://patentable.app/patents/US-10483153","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10483153","json":"https://patentable.app/api/llm-context/US-10483153","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:57:00.472Z"}