{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10486961","patent":{"patent_number":"US-10486961","title":"Method for producing a MEMS sensor, and MEMS sensor","assignee":null,"inventors":[],"filing_date":"2018-08-20T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R"],"num_claims":16,"abstract":"In accordance with an embodiment, a MEMS structure is produced on a front side of a substrate. A decoupling structure which has recesses is produced in the substrate, which decoupling structure decouples a first region from a second region of the substrate in terms of stresses. In a rear side, situated opposite the front side, of the substrate, a first cavity is produced by means of a first etching process and a second cavity is produced by means of a second etching process. The first cavity and the second cavity are produced such that the second cavity encompasses the first cavity and such that the second cavity adjoins a base region of the MEMS structure and a base region of the decoupling structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for producing a MEMS sensor, and MEMS sensor","description":"In accordance with an embodiment, a MEMS structure is produced on a front side of a substrate. A decoupling structure which has recesses is produced in the substrate, which decoupling structure decoup","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10486961","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10486961","citation_suggestion":"Patentable. \"Method for producing a MEMS sensor, and MEMS sensor\" (US-10486961). https://patentable.app/patents/US-10486961","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10486961","json":"https://patentable.app/api/llm-context/US-10486961","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:24:45.643Z"}