{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10488334","patent":{"patent_number":"US-10488334","title":"Growth-rate measuring apparatus and growth-rate detection method","assignee":null,"inventors":[],"filing_date":"2018-04-05T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","H01L","G01N","G01N","G01N","H01L"],"num_claims":17,"abstract":"A growth-rate measuring apparatus has a refractometer to irradiate light of a plurality of different wavelengths to a surface of a substrate to measure a reflectivity of the surface of the substrate per different wavelengths, a fitter to fit a reflectivity calculated by a model function, the model function being obtained in advance, to a measured value of the reflectivity, for at least one layer of thin films laminated one by one on the substrate, with at least one of a refractive index and a growth rate as a fitting parameter, a parameter extractor to extract sets of fitting parameters for each wavelength in the different wavelengths, respectively, for which an error between the calculated reflectivity and the measured value of the reflectivity is minimum, and a parameter selector to select an optimum set of values of the fitting parameter, among the fitting parameters extracted for the different wavelengths."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Growth-rate measuring apparatus and growth-rate detection method","description":"A growth-rate measuring apparatus has a refractometer to irradiate light of a plurality of different wavelengths to a surface of a substrate to measure a reflectivity of the surface of the substrate p","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10488334","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10488334","citation_suggestion":"Patentable. \"Growth-rate measuring apparatus and growth-rate detection method\" (US-10488334). https://patentable.app/patents/US-10488334","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10488334","json":"https://patentable.app/api/llm-context/US-10488334","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:37:58.726Z"}