{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10488765","patent":{"patent_number":"US-10488765","title":"Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus","assignee":null,"inventors":[],"filing_date":"2018-09-27T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":13,"abstract":"Disclosed is a method of optimizing within an inspection apparatus, the position and/or size (and therefore focus) of a measurement illumination spot relative to a target on a substrate. The method comprises detecting scattered radiation from at least the target resultant from illuminating the target, for different sizes and/or positions of said illumination spot relative to the target; and optimizing said position and/or size of the measurement illumination spot relative to the target based on a characteristic of the detected scattered radiation for the different sizes and/or positions of said illumination spot relative to the target."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus","description":"Disclosed is a method of optimizing within an inspection apparatus, the position and/or size (and therefore focus) of a measurement illumination spot relative to a target on a substrate. The method co","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10488765","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10488765","citation_suggestion":"Patentable. \"Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus\" (US-10488765). https://patentable.app/patents/US-10488765","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10488765","json":"https://patentable.app/api/llm-context/US-10488765","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:33:34.515Z"}