{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10489902","patent":{"patent_number":"US-10489902","title":"Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same","assignee":null,"inventors":[],"filing_date":"2016-08-25T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["G06T","G01N","G01N","G06T","H01L","H01L","H04N","G01N","G06T","G06T"],"num_claims":18,"abstract":"An inspection apparatus includes a light source device providing incident light to a substrate, an objective lens receiving reflection light reflected from the substrate, a light splitting device disposed over the objective lens, first and second optical sensors disposed at both sides of the light splitting device, respectively, and first and second spatial filters disposed between the first optical sensor and the substrate and between the second optical sensor and the substrate, respectively. The first and second spatial filters transmit the reflection light in different forms from each other."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same","description":"An inspection apparatus includes a light source device providing incident light to a substrate, an objective lens receiving reflection light reflected from the substrate, a light splitting device disp","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10489902","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10489902","citation_suggestion":"Patentable. \"Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same\" (US-10489902). https://patentable.app/patents/US-10489902","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10489902","json":"https://patentable.app/api/llm-context/US-10489902","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:10:03.353Z"}