{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10490378","patent":{"patent_number":"US-10490378","title":"Fine-scale micro-air bridge fuse","assignee":null,"inventors":[],"filing_date":"2017-08-09T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":11,"abstract":"Structures of and methods for fabricating fine-scale interconnects and fuses are disclosed. A “mushroom”-type structure with a narrow stalk supporting a wider cap can be used for fine-scale interconnects with widths on the scale of hundreds of nanometers that have low resistivity. Micro-air bridges can be introduced by omitting the stalk in sections of the interconnect, allowing the interconnect to bridge over obstacles. The mushroom-type micro-air bridge structure can also be modified to create fine-scale fuses that have low resistivity overall and sections of significantly higher resistivity where the micro-air bridges exist. The significantly higher resistivity results in preferential fusing at the micro-air bridges. Both mushroom interconnects and mushroom fuses can be fabricated using electron beam lithography."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Fine-scale micro-air bridge fuse","description":"Structures of and methods for fabricating fine-scale interconnects and fuses are disclosed. A “mushroom”-type structure with a narrow stalk supporting a wider cap can be used for fine-scale interconne","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10490378","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10490378","citation_suggestion":"Patentable. \"Fine-scale micro-air bridge fuse\" (US-10490378). https://patentable.app/patents/US-10490378","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10490378","json":"https://patentable.app/api/llm-context/US-10490378","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:04:13.249Z"}