{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10491980","patent":{"patent_number":"US-10491980","title":"Multiple MEMS motor apparatus with common vent","assignee":null,"inventors":[],"filing_date":"2016-08-03T00:00:00.000Z","publication_date":"2019-11-26T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R","H04R","H04R","H04R","H04R"],"num_claims":20,"abstract":"A first MEMS motor and s second MEMS motor share a common back volume and a common support structure, and the common support structure is configured to support a first diaphragm and the first back plate, and the common support structure is also configured to support the second diaphragm and the second back plate. A channel passes through the common support structure and communicates with the exterior environment, the channel being of a first diameter, the channel being disposed beyond an outer periphery of each back plate. An opening extends through the silicon nitride layer, the opening having a second diameter, the second diameter being less than the first diameter, the channel communicating with the opening. The opening has a length that is orthogonal to second diameter, and the first back plate and the second back plate have a thickness, wherein the length is no greater than twice the thickness. The channel and the opening allow direct communication between the exterior environment and the common back volume."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Multiple MEMS motor apparatus with common vent","description":"A first MEMS motor and s second MEMS motor share a common back volume and a common support structure, and the common support structure is configured to support a first diaphragm and the first back pla","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10491980","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10491980","citation_suggestion":"Patentable. \"Multiple MEMS motor apparatus with common vent\" (US-10491980). https://patentable.app/patents/US-10491980","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10491980","json":"https://patentable.app/api/llm-context/US-10491980","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:16:45.404Z"}