{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10495967","patent":{"patent_number":"US-10495967","title":"Method of mask simulation model for OPC and mask making","assignee":null,"inventors":[],"filing_date":"2017-11-15T00:00:00.000Z","publication_date":"2019-12-03T00:00:00.000Z","cpc_codes":["G06F","G06F","H01L","H01L","G06F"],"num_claims":20,"abstract":"The present disclosure provides an integrated circuit (IC) method in accordance with some embodiments. The method includes building a mask model to simulate a mask image and a compound lithography computational model to simulate a wafer pattern; calibrating the mask model using a measured mask image; calibrating the compound lithography computational model using a measured wafer data and the calibrated mask model; and performing an optical proximity correction (OPC) process to an IC pattern using the calibrated compound computational model, thereby generating a mask pattern for mask fabrication."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of mask simulation model for OPC and mask making","description":"The present disclosure provides an integrated circuit (IC) method in accordance with some embodiments. The method includes building a mask model to simulate a mask image and a compound lithography com","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10495967","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10495967","citation_suggestion":"Patentable. \"Method of mask simulation model for OPC and mask making\" (US-10495967). https://patentable.app/patents/US-10495967","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10495967","json":"https://patentable.app/api/llm-context/US-10495967","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:37:15.193Z"}