{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10496078","patent":{"patent_number":"US-10496078","title":"Substrate processing system, substrate processing apparatus and management device","assignee":null,"inventors":[],"filing_date":"2018-03-19T00:00:00.000Z","publication_date":"2019-12-03T00:00:00.000Z","cpc_codes":["G05B","G05B","G06F","H01L","G05B","G05B","G05B"],"num_claims":13,"abstract":"There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses. The plurality of substrate processing apparatuses acquires the second data information from the response data."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing system, substrate processing apparatus and management device","description":"There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving i","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10496078","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10496078","citation_suggestion":"Patentable. \"Substrate processing system, substrate processing apparatus and management device\" (US-10496078). https://patentable.app/patents/US-10496078","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10496078","json":"https://patentable.app/api/llm-context/US-10496078","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:24:15.081Z"}