{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10497536","patent":{"patent_number":"US-10497536","title":"Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system","assignee":null,"inventors":[],"filing_date":"2017-07-10T00:00:00.000Z","publication_date":"2019-12-03T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":12,"abstract":"A multi-beam scanning electron microscopy (SEM) system is disclosed. The system includes an electron beam source configured to generate a source electron beam. The system includes a set of electron-optical elements configured to generate a flood electron beam from the source electron beam. The system includes a multi-beam lens array with a plurality of electron-optical pathways configured to split the flood electron beam into a plurality of primary electron beams, and a plurality of electrically-charged array layers configured to adjust at least some of the plurality of primary electron beams. The system includes a set of electron-optical elements configured to direct at least some of the plurality of primary electron beams onto a surface of a sample secured by a stage. The system includes a detector array configured to detect a plurality of electrons emanated from the surface of the sample in response to the plurality of primary electron beams."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system","description":"A multi-beam scanning electron microscopy (SEM) system is disclosed. The system includes an electron beam source configured to generate a source electron beam. The system includes a set of electron-op","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10497536","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10497536","citation_suggestion":"Patentable. \"Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system\" (US-10497536). https://patentable.app/patents/US-10497536","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10497536","json":"https://patentable.app/api/llm-context/US-10497536","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:00:17.188Z"}