{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10497588","patent":{"patent_number":"US-10497588","title":"EFEM, equipment front end module","assignee":null,"inventors":[],"filing_date":"2018-03-22T00:00:00.000Z","publication_date":"2019-12-03T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":8,"abstract":"The present invention relates to an equipment front end module (EFEM) configured to perform wafer transfer between process equipment and a wafer storage device that stores wafers. More particularly, the present invention relates to an equipment front end module (EFEM), in which harmful substances such as fumes, etc. are prevented from accumulating on an exhaust unit to maintain cleanness in a wafer transfer chamber at a high level, thus preventing contamination in the wafer transfer chamber."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"EFEM, equipment front end module","description":"The present invention relates to an equipment front end module (EFEM) configured to perform wafer transfer between process equipment and a wafer storage device that stores wafers. More particularly, t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10497588","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10497588","citation_suggestion":"Patentable. \"EFEM, equipment front end module\" (US-10497588). https://patentable.app/patents/US-10497588","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10497588","json":"https://patentable.app/api/llm-context/US-10497588","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T23:08:30.026Z"}