{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10497776","patent":{"patent_number":"US-10497776","title":"Narrow gap device with parallel releasing structure","assignee":null,"inventors":[],"filing_date":"2013-06-19T00:00:00.000Z","publication_date":"2019-12-03T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"The present disclosure relates to a method of etching a narrow gap using one or more parallel releasing structures to improve etching performance, and an associated apparatus. In some embodiments, the method provides a semiconductor substrate with a narrow gap having a sacrificial material. One or more parallel releasing structures are formed within the semiconductor substrate at positions that abut the narrow gap. An etching process is then performed to simultaneously remove the sacrificial material from the narrow gap along a first direction from the one or more parallel releasing structures and along a second direction, perpendicular to the first direction. By simultaneously etching the sacrificial material from both the direction of the narrow gap and from the direction of the one or more parallel releasing structures, the sacrificial material is removed in less time, since the etch is not limited by a size of the narrow gap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Narrow gap device with parallel releasing structure","description":"The present disclosure relates to a method of etching a narrow gap using one or more parallel releasing structures to improve etching performance, and an associated apparatus. In some embodiments, the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10497776","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10497776","citation_suggestion":"Patentable. \"Narrow gap device with parallel releasing structure\" (US-10497776). https://patentable.app/patents/US-10497776","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10497776","json":"https://patentable.app/api/llm-context/US-10497776","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T11:20:08.297Z"}