{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10502549","patent":{"patent_number":"US-10502549","title":"Model-based single parameter measurement","assignee":null,"inventors":[],"filing_date":"2016-03-21T00:00:00.000Z","publication_date":"2019-12-10T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":19,"abstract":"Methods and systems for building and using a parameter isolation model to isolate measurement signal information associated with a parameter of interest from measurement signal information associated with incidental model parameters are presented herein. The parameter isolation model is trained by mapping measurement signals associated with a first set of instances of a metrology target having known values of a plurality of incidental model parameters and known values of a parameter of interest to measurement signals associated with a second set of instances of the metrology target having nominal values of the plurality of incidental model parameters and the known values of the parameter of interest. The trained parameter isolation model receives raw measurement signals and isolates measurement signal information associated with a specific parameter of interest for model-based parameter estimation. The number of floating parameters of the measurement model is reduced, resulting in a significant reduction of computational effort."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Model-based single parameter measurement","description":"Methods and systems for building and using a parameter isolation model to isolate measurement signal information associated with a parameter of interest from measurement signal information associated ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10502549","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10502549","citation_suggestion":"Patentable. \"Model-based single parameter measurement\" (US-10502549). https://patentable.app/patents/US-10502549","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10502549","json":"https://patentable.app/api/llm-context/US-10502549","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:03:20.395Z"}