{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10502702","patent":{"patent_number":"US-10502702","title":"Capacitor type humidity sensor","assignee":null,"inventors":[],"filing_date":"2014-12-29T00:00:00.000Z","publication_date":"2019-12-10T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":25,"abstract":"A capacitor type humidity sensor may include a semiconductor substrate comprising a humidity sensing region and a peripheral circuit region, a sensing capacitor disposed on the humidity sensing region and the sensing capacitor comprising a humidity sensitive layer, a dielectric layer made of a material different than from the humidity sensitive layer, and a reference capacitor configured to provide a reference capacitance value, wherein the sensing capacitor and the reference capacitor are disposed on different planes from each other. A reference capacitor is disposed at an arbitrary region under a sensing capacitor among a humidity sensing region or at a peripheral circuit region. The reference capacitor is a metal-insulator-metal (MIM) capacitor or a polysilicon-insulator-polysilicon (PIP) capacitor."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Capacitor type humidity sensor","description":"A capacitor type humidity sensor may include a semiconductor substrate comprising a humidity sensing region and a peripheral circuit region, a sensing capacitor disposed on the humidity sensing region","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10502702","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10502702","citation_suggestion":"Patentable. \"Capacitor type humidity sensor\" (US-10502702). https://patentable.app/patents/US-10502702","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10502702","json":"https://patentable.app/api/llm-context/US-10502702","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:45:55.108Z"}