{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10503070","patent":{"patent_number":"US-10503070","title":"Photosensitive material and method of lithography","assignee":null,"inventors":[],"filing_date":"2016-05-09T00:00:00.000Z","publication_date":"2019-12-10T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"Methods and materials directed to a photosensitive material and a method of performing a lithography process using the photosensitive material are described. A semiconductor substrate is provided. A layer including an additive component is formed over the semiconductor substrate. The additive component includes a metal cation. One or more bonds are formed to bond the metal cation and one or more anions. Each of the one or more anions is one of a protecting group and a polymer chain bonding component. The polymer chain bonding component is bonded to a polymer chain of the layer. The layer is exposed to a radiation beam."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Photosensitive material and method of lithography","description":"Methods and materials directed to a photosensitive material and a method of performing a lithography process using the photosensitive material are described. A semiconductor substrate is provided. A l","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10503070","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10503070","citation_suggestion":"Patentable. \"Photosensitive material and method of lithography\" (US-10503070). https://patentable.app/patents/US-10503070","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10503070","json":"https://patentable.app/api/llm-context/US-10503070","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T09:23:32.340Z"}