{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10503144","patent":{"patent_number":"US-10503144","title":"Anomaly detection with correlation coeffiecients","assignee":null,"inventors":[],"filing_date":"2017-10-24T00:00:00.000Z","publication_date":"2019-12-10T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","G05B","G05B","G05B"],"num_claims":20,"abstract":"A method for detecting an anomaly in sensor data generated in a substrate processing apparatus is disclosed herein. A plurality of data sets is received. A first data set from a first sensor and second data set from a second sensor are selected. The first second sensors are defined as a sensor pair. A reference correlation is generated by selecting a subset of values in each data set for each of the first and second data sets. A difference of remaining data correlation outside the subset of values in each data set to the reference correlation is normalized. The normalized data set is filtered to smooth the normalized difference to avoid isolated outliers with high chance of false positive candidates. One or more anomalies are identified. Process parameters of the substrate processing apparatus are adjusted, based on the one or more identified anomalies from the filtered data set."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Anomaly detection with correlation coeffiecients","description":"A method for detecting an anomaly in sensor data generated in a substrate processing apparatus is disclosed herein. A plurality of data sets is received. A first data set from a first sensor and secon","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10503144","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10503144","citation_suggestion":"Patentable. \"Anomaly detection with correlation coeffiecients\" (US-10503144). https://patentable.app/patents/US-10503144","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10503144","json":"https://patentable.app/api/llm-context/US-10503144","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:34:20.049Z"}