{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10504753","patent":{"patent_number":"US-10504753","title":"Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method","assignee":null,"inventors":[],"filing_date":"2013-12-13T00:00:00.000Z","publication_date":"2019-12-10T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":20,"abstract":"A brush cleaning apparatus includes a wafer support configured to support a wafer, and at least one cleaning brush moveable relative to the wafer support. The at least one cleaning brush has opposite first and second sides, and, on the first side, a planar cleaning surface configured to come into contact with the wafer supported by the wafer support to remove contaminants from the wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method","description":"A brush cleaning apparatus includes a wafer support configured to support a wafer, and at least one cleaning brush moveable relative to the wafer support. The at least one cleaning brush has opposite ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10504753","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10504753","citation_suggestion":"Patentable. \"Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method\" (US-10504753). https://patentable.app/patents/US-10504753","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10504753","json":"https://patentable.app/api/llm-context/US-10504753","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:07:14.552Z"}