{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10509010","patent":{"patent_number":"US-10509010","title":"Vacuum processing apparatus and mass spectrometer","assignee":null,"inventors":[],"filing_date":"2015-11-20T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["G01N","H01L","H01L","H01L"],"num_claims":5,"abstract":"A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3. "},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Vacuum processing apparatus and mass spectrometer","description":"A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10509010","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10509010","citation_suggestion":"Patentable. \"Vacuum processing apparatus and mass spectrometer\" (US-10509010). https://patentable.app/patents/US-10509010","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10509010","json":"https://patentable.app/api/llm-context/US-10509010","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:35:02.358Z"}