{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10509052","patent":{"patent_number":"US-10509052","title":"Smart vibration wafer with optional integration with semiconductor processing tool","assignee":null,"inventors":[],"filing_date":"2017-02-06T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"A test wafer having two spaced-apart accelerometers mounted thereon is disclosed. The accelerometers may be positioned at locations located along a common axis passing through the center of gravity of the test wafer. The test wafer may include a controller that may be used to transmit acceleration data collected by the accelerometers to another device. In some implementations, a semiconductor processing tool is provided that includes a test wafer receptacle for storing a test wafer that remains with the semiconductor processing tool and that may be retrieved by a wafer handling robot for performing a test cycle during periods when the wafer handling robot is not performing substrate transport operations."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Smart vibration wafer with optional integration with semiconductor processing tool","description":"A test wafer having two spaced-apart accelerometers mounted thereon is disclosed. The accelerometers may be positioned at locations located along a common axis passing through the center of gravity of","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10509052","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10509052","citation_suggestion":"Patentable. \"Smart vibration wafer with optional integration with semiconductor processing tool\" (US-10509052). https://patentable.app/patents/US-10509052","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10509052","json":"https://patentable.app/api/llm-context/US-10509052","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:11:21.239Z"}