{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10509420","patent":{"patent_number":"US-10509420","title":"Reticle purging system and method thereof","assignee":null,"inventors":[],"filing_date":"2016-07-12T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["G05D","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A reticle purging system includes an automated pod opener, a reticle holding device, a reticle transporting device and at least one purging device. The reticle holding device has a reticle occupiable zone thereon. The reticle transporting device is assigned with a transportation path from the automated pod opener to the reticle holding device. The reticle occupiable zone is exposed to the purging device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Reticle purging system and method thereof","description":"A reticle purging system includes an automated pod opener, a reticle holding device, a reticle transporting device and at least one purging device. The reticle holding device has a reticle occupiable ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10509420","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10509420","citation_suggestion":"Patentable. \"Reticle purging system and method thereof\" (US-10509420). https://patentable.app/patents/US-10509420","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10509420","json":"https://patentable.app/api/llm-context/US-10509420","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:56:26.179Z"}