{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10509422","patent":{"patent_number":"US-10509422","title":"Mass flow controller","assignee":null,"inventors":[],"filing_date":"2015-08-20T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["G05D","G05D"],"num_claims":21,"abstract":"A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream side of the flow meter. The mechanical pressure-regulating valve is embedded in a base of the mass flow controller. The mass flow controller also includes a compulsive valve-opening mechanism configured to compulsorily open the mechanical pressure-regulating valve. Thereby, the mass flow controller can instantly recover pressure on the upstream side of the flow meter to its original pressure even in a case where the pressure changes, and can raise measurement accuracy of a flow rate measured by the flow meter."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mass flow controller","description":"A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10509422","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10509422","citation_suggestion":"Patentable. \"Mass flow controller\" (US-10509422). https://patentable.app/patents/US-10509422","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10509422","json":"https://patentable.app/api/llm-context/US-10509422","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:54:10.473Z"}