{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10510534","patent":{"patent_number":"US-10510534","title":"Thin film, method of fabricating the same, and apparatus for fabricating the same","assignee":null,"inventors":[],"filing_date":"2017-09-11T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":12,"abstract":"An apparatus for fabricating a thin film is provided. The apparatus includes a tube including one end and another end, a first heater supplying heat to a first region, adjacent to the one end, of the tube, a second heater supplying heat to a second region, adjacent to the another end, of the tube and disposed in parallel to the first heater along the tube, a gas inlet through which a source gas is supplied to the one end of the tube, and a gas outlet through which the source gas is exhausted from the another end of the tube."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Thin film, method of fabricating the same, and apparatus for fabricating the same","description":"An apparatus for fabricating a thin film is provided. The apparatus includes a tube including one end and another end, a first heater supplying heat to a first region, adjacent to the one end, of the ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10510534","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10510534","citation_suggestion":"Patentable. \"Thin film, method of fabricating the same, and apparatus for fabricating the same\" (US-10510534). https://patentable.app/patents/US-10510534","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10510534","json":"https://patentable.app/api/llm-context/US-10510534","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:15:46.705Z"}