{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10510550","patent":{"patent_number":"US-10510550","title":"Polarization-dependent laser-assisted plasma etching","assignee":null,"inventors":[],"filing_date":"2018-09-25T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method of laser-assisted plasma etching with polarized light comprises providing a surface of a substrate that includes at least one surface region having trenches arranged in a unidirectional pattern along an x-direction or a y-direction of the surface, where each trench has a depth along a z-direction. The trenches extend substantially in parallel with each other and have a half-pitch of about 100 nm or less. The surface is exposed to a plasma and simultaneously illuminated with a pulsed laser beam having a predetermined polarization along the x-direction or the y-direction, and the trenches are etched."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Polarization-dependent laser-assisted plasma etching","description":"A method of laser-assisted plasma etching with polarized light comprises providing a surface of a substrate that includes at least one surface region having trenches arranged in a unidirectional patte","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10510550","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10510550","citation_suggestion":"Patentable. \"Polarization-dependent laser-assisted plasma etching\" (US-10510550). https://patentable.app/patents/US-10510550","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10510550","json":"https://patentable.app/api/llm-context/US-10510550","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:30:56.491Z"}