{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10510572","patent":{"patent_number":"US-10510572","title":"Semiconductor processing station","assignee":null,"inventors":[],"filing_date":"2019-06-24T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A semiconductor processing station including a platform, a load port, and a carrier transport track is provided. The platform includes an intake/outtake port and a plurality of processing modules. The load port includes a load chamber, a movable cover, and a carrier transfer module. The load chamber communicates with the intake/outtake port and has a load opening at its top end for receiving a transport carrier within the load chamber. The movable cover is disposed at the load opening and configured to seal the load opening. The carrier transfer module is configured to transfer the transport carrier to the intake/outtake port. The carrier transport track has a bottom side configured to open the load chamber."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor processing station","description":"A semiconductor processing station including a platform, a load port, and a carrier transport track is provided. The platform includes an intake/outtake port and a plurality of processing modules. The","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10510572","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10510572","citation_suggestion":"Patentable. \"Semiconductor processing station\" (US-10510572). https://patentable.app/patents/US-10510572","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10510572","json":"https://patentable.app/api/llm-context/US-10510572","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:06:22.641Z"}