{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10510785","patent":{"patent_number":"US-10510785","title":"Method for manufacturing TFT substrate and method for manufacturing TFT display apparatus","assignee":null,"inventors":[],"filing_date":"2017-11-08T00:00:00.000Z","publication_date":"2019-12-17T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":15,"abstract":"The present disclosure provides a method for manufacturing a TFT substrate and a method for manufacturing a TFT display apparatus, including the steps of: providing a base substrate; forming a source/drain metal layer on the base substrate; depositing a photoresist layer on the source/drain metal layer and patterning the photoresist layer to form a desired pattern of the photoresist layer; using a BCl3 gas to remove metal oxides generated on surface of the source/drain metal layer with air; and using a mixing gas including a Cl2 gas and the BCl3 gas to etch the source/drain metal layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for manufacturing TFT substrate and method for manufacturing TFT display apparatus","description":"The present disclosure provides a method for manufacturing a TFT substrate and a method for manufacturing a TFT display apparatus, including the steps of: providing a base substrate; forming a source/","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10510785","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10510785","citation_suggestion":"Patentable. \"Method for manufacturing TFT substrate and method for manufacturing TFT display apparatus\" (US-10510785). https://patentable.app/patents/US-10510785","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10510785","json":"https://patentable.app/api/llm-context/US-10510785","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:26:44.924Z"}