{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10514612","patent":{"patent_number":"US-10514612","title":"Method and system for overlay control","assignee":null,"inventors":[],"filing_date":"2018-07-23T00:00:00.000Z","publication_date":"2019-12-24T00:00:00.000Z","cpc_codes":["G06F","G01N","G06F","G06F","G06F","G06F","H01L"],"num_claims":20,"abstract":"A method for overlay monitoring and control is introduced in the present disclosure. The method includes selecting a group of patterned wafers from a lot using a wafer selection model; selecting a group of fields for each of the selected group of patterned wafers using a field selection model; selecting at least one point in each of the selected group of fields using a point selection model; measuring overlay errors of the selected at least one point on a selected wafer; forming an overlay correction map using the measured overlay errors on the selected wafer; and generating a combined overlay correction map using the overlay correction map of each selected wafer in the lot."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for overlay control","description":"A method for overlay monitoring and control is introduced in the present disclosure. The method includes selecting a group of patterned wafers from a lot using a wafer selection model; selecting a gro","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10514612","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10514612","citation_suggestion":"Patentable. \"Method and system for overlay control\" (US-10514612). https://patentable.app/patents/US-10514612","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10514612","json":"https://patentable.app/api/llm-context/US-10514612","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:44:29.570Z"}