{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10514684","patent":{"patent_number":"US-10514684","title":"Schedule preparation method for substrate processing device and substrate processing device","assignee":null,"inventors":[],"filing_date":"2015-06-11T00:00:00.000Z","publication_date":"2019-12-24T00:00:00.000Z","cpc_codes":["G05B","G05B","H01L","H01L","H01L","H01L","G05B","G05B"],"num_claims":9,"abstract":"A method by which a schedule preparing portion included in a substrate processing apparatus, having at least one single substrate processing unit and a controller, prepares a chronological schedule for operations of the substrate processing apparatus. The method includes a schedule preparation step of preparing a schedule for each substrate by positioning, in chronological order, a plurality of blocks, each specifying an operation to be performed on the substrate. The schedule preparation step includes a high load avoidance positioning step in which, in preparing a schedule for a plurality of substrates, blocks corresponding to a high load operation in which a high control load occurs at least temporarily in the controller are positioned on a time axis so that high load time slots, during which a high control load occurs in the controller, are not concentrated."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Schedule preparation method for substrate processing device and substrate processing device","description":"A method by which a schedule preparing portion included in a substrate processing apparatus, having at least one single substrate processing unit and a controller, prepares a chronological schedule fo","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10514684","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10514684","citation_suggestion":"Patentable. \"Schedule preparation method for substrate processing device and substrate processing device\" (US-10514684). https://patentable.app/patents/US-10514684","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10514684","json":"https://patentable.app/api/llm-context/US-10514684","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:35:46.204Z"}