{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10515808","patent":{"patent_number":"US-10515808","title":"Systems and methods for chemical mechanical polish and clean","assignee":null,"inventors":[],"filing_date":"2016-09-16T00:00:00.000Z","publication_date":"2019-12-24T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A chemical mechanical polishing (CMP) system includes an O3/DIW generator, a polishing unit, and a cleaning unit. The O3/DIW generator is configured to generate an O3/DIW solution including ozone gas (O3) dissolved in deionized water (DIW). The polishing unit includes components for buffing a surface of a semiconductor structure, and a pipeline coupled to the O3/DIW generator to receive the O3/DIW solution for the buffing. The cleaning unit is coupled to the O3/DIW generator and is configured to clean the surface of the semiconductor structure using the O3/DIW solution."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for chemical mechanical polish and clean","description":"A chemical mechanical polishing (CMP) system includes an O3/DIW generator, a polishing unit, and a cleaning unit. The O3/DIW generator is configured to generate an O3/DIW solution including ozone gas ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10515808","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10515808","citation_suggestion":"Patentable. \"Systems and methods for chemical mechanical polish and clean\" (US-10515808). https://patentable.app/patents/US-10515808","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10515808","json":"https://patentable.app/api/llm-context/US-10515808","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:09:00.621Z"}