{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10515824","patent":{"patent_number":"US-10515824","title":"Enhanced etch anisotropy using nanoparticles as banking agents in the presence or absence of a magnetic or electrical field","assignee":null,"inventors":[],"filing_date":"2018-01-11T00:00:00.000Z","publication_date":"2019-12-24T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":24,"abstract":"A method of anisotropic etching comprises forming a metal layer above a substrate. A mask layer is formed on the metal layer with openings defined in the mask layer to expose portions of the metal layer. The exposed portions of the metal layer are introduced to an active etchant solution that includes nanoparticles as an insoluble banking agent. In further embodiments, the exposed portions of the metal layer are introduced to a magnetic and/or an electrical field."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Enhanced etch anisotropy using nanoparticles as banking agents in the presence or absence of a magnetic or electrical field","description":"A method of anisotropic etching comprises forming a metal layer above a substrate. A mask layer is formed on the metal layer with openings defined in the mask layer to expose portions of the metal lay","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10515824","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10515824","citation_suggestion":"Patentable. \"Enhanced etch anisotropy using nanoparticles as banking agents in the presence or absence of a magnetic or electrical field\" (US-10515824). https://patentable.app/patents/US-10515824","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10515824","json":"https://patentable.app/api/llm-context/US-10515824","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:45:31.168Z"}