{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10515840","patent":{"patent_number":"US-10515840","title":"Expanding method and expanding apparatus","assignee":null,"inventors":[],"filing_date":"2018-05-31T00:00:00.000Z","publication_date":"2019-12-24T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":2,"abstract":"An expanding method for expanding an expandable sheet is provided. A wafer is attached to a central portion of the expandable sheet and an annular frame is attached to a peripheral portion of the expandable sheet. The expanding method includes an annular frame holding step of holding the annular frame by using a holding unit, an expanding step of pushing the expandable sheet by using a pushing unit, thereby expanding the expandable sheet, a suction holding step of holding the wafer through the expandable sheet on a holding table under suction, and a push force removing step of removing a push force applied from the pushing unit to the expandable sheet. A minute projection for preventing the shrinkage of the expandable sheet is formed on the holding table along the outer circumference thereof."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Expanding method and expanding apparatus","description":"An expanding method for expanding an expandable sheet is provided. A wafer is attached to a central portion of the expandable sheet and an annular frame is attached to a peripheral portion of the expa","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10515840","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10515840","citation_suggestion":"Patentable. \"Expanding method and expanding apparatus\" (US-10515840). https://patentable.app/patents/US-10515840","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10515840","json":"https://patentable.app/api/llm-context/US-10515840","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T11:13:50.363Z"}