{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10518418","patent":{"patent_number":"US-10518418","title":"Wafer swapper","assignee":null,"inventors":[],"filing_date":"2018-01-02T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["B25J","H01L","H01L","H01L"],"num_claims":19,"abstract":"The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Wafer swapper","description":"The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are rela","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10518418","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10518418","citation_suggestion":"Patentable. \"Wafer swapper\" (US-10518418). https://patentable.app/patents/US-10518418","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10518418","json":"https://patentable.app/api/llm-context/US-10518418","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:43:57.598Z"}