{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10519538","patent":{"patent_number":"US-10519538","title":"Sputtering target comprising Al—Te—Cu—Zr alloy, and method for producing same","assignee":null,"inventors":[],"filing_date":"2015-02-06T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["G11B"],"num_claims":18,"abstract":"An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target. An object of the present invention is to provide an Al—Te—Cu—Zr alloy sputtering target capable of effectively reducing particle generation, nodule formation and the like upon sputtering and further capable of reducing oxygen contained in the target."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sputtering target comprising Al—Te—Cu—Zr alloy, and method for producing same","description":"An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10519538","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10519538","citation_suggestion":"Patentable. \"Sputtering target comprising Al—Te—Cu—Zr alloy, and method for producing same\" (US-10519538). https://patentable.app/patents/US-10519538","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10519538","json":"https://patentable.app/api/llm-context/US-10519538","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:26:22.121Z"}