{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10520109","patent":{"patent_number":"US-10520109","title":"Vacuum valve with optical sensor","assignee":null,"inventors":[],"filing_date":"2018-03-09T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":17,"abstract":"A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, and a second sealing face is the valve closure. A drive unit coupled to the valve closure designed so that the valve closure can be adjusted to provide respective valve opening states and is movable from an open position to a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening in a gastight manner. The vacuum valve system has an optical sensor unit, designed to detect an optical measurement signal and an optical detection axis of the optical sensor unit oriented so that the measurement signal can be detected, and can be produced in a test position."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Vacuum valve with optical sensor","description":"A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10520109","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10520109","citation_suggestion":"Patentable. \"Vacuum valve with optical sensor\" (US-10520109). https://patentable.app/patents/US-10520109","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10520109","json":"https://patentable.app/api/llm-context/US-10520109","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T21:10:42.655Z"}