{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10520832","patent":{"patent_number":"US-10520832","title":"Topographic phase control for overlay measurement","assignee":null,"inventors":[],"filing_date":"2016-05-19T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["G01N","G06T","H04N","H04N"],"num_claims":7,"abstract":"Metrology tools and methods are provided, which estimate the effect of topographic phases corresponding to different diffraction orders, which result from light scattering on periodic targets, and adjust the measurement conditions to improve measurement accuracy. In imaging, overlay error magnification may be reduced by choosing appropriate measurement conditions based on analysis of contrast function behavior, changing illumination conditions (reducing spectrum width and illumination NA), using polarizing targets and/or optical systems, using multiple defocusing positions etc. On-the-fly calibration of measurement results may be carried out in imaging or scatterometry using additional measurements or additional target cells."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Topographic phase control for overlay measurement","description":"Metrology tools and methods are provided, which estimate the effect of topographic phases corresponding to different diffraction orders, which result from light scattering on periodic targets, and adj","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10520832","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10520832","citation_suggestion":"Patentable. \"Topographic phase control for overlay measurement\" (US-10520832). https://patentable.app/patents/US-10520832","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10520832","json":"https://patentable.app/api/llm-context/US-10520832","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:35:36.863Z"}