{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10520834","patent":{"patent_number":"US-10520834","title":"Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object","assignee":null,"inventors":[],"filing_date":"2016-09-29T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":21,"abstract":"A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves the noncontact holder; scale plates that serve as a reference of movement of the noncontact holder; a first measurement section that has scale plates and Y heads, one of the scale plates and the Y heads being provided at the noncontact holder and the other of the scale plates and the Y heads being provided between the scale plates and the noncontact holder, and that measures position information of the Y heads; a second measurement section that measures position information of the other of the scale plates and the Y heads; and a position measurement system that obtains position information of the noncontact holder on the basis of the position information measured by the first and the second measurement sections."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object","description":"A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves the noncontact holder; scale plates that s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10520834","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10520834","citation_suggestion":"Patentable. \"Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object\" (US-10520834). https://patentable.app/patents/US-10520834","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10520834","json":"https://patentable.app/api/llm-context/US-10520834","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:23:55.071Z"}