{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10522351","patent":{"patent_number":"US-10522351","title":"Method of forming a pattern","assignee":null,"inventors":[],"filing_date":"2018-03-16T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":18,"abstract":"A method of forming a pattern includes forming a lower layer on a substrate, forming a mask pattern on the lower layer, the mask pattern extending in a first direction parallel to a top surface of the substrate, and performing an etching process using an ion beam on the substrate, such that the ion beam is irradiated in parallel to a plane defined by the first direction and a direction perpendicular to the top surface of the substrate, and is irradiated at a tilt angle with respect to the top surface of the substrate, wherein performing the etching process includes adjusting the tilt angle of the ion beam to selectively etch the lower layer or the mask pattern."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming a pattern","description":"A method of forming a pattern includes forming a lower layer on a substrate, forming a mask pattern on the lower layer, the mask pattern extending in a first direction parallel to a top surface of the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10522351","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10522351","citation_suggestion":"Patentable. \"Method of forming a pattern\" (US-10522351). https://patentable.app/patents/US-10522351","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10522351","json":"https://patentable.app/api/llm-context/US-10522351","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T20:33:14.603Z"}