{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10522662","patent":{"patent_number":"US-10522662","title":"FinFET device with T-shaped fin and method for forming the same","assignee":null,"inventors":[],"filing_date":"2018-06-22T00:00:00.000Z","publication_date":"2019-12-31T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A method of forming a semiconductor device structure is provided. The method includes forming a fin structure protruding from a substrate and forming a first liner layer to cover a top surface and a sidewall of the fin structure. The first liner layer is patterned by performing a wet etching process, so as to remain a portion of the first liner layer that covers the top surface of the fin structure and a portion of the sidewall of the fin structure. The remained portion of the first liner layer is used as an etch mask to remove a portion of the fin structure from the sidewall of the fin structure, so as to form a lateral recess in the fin structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"FinFET device with T-shaped fin and method for forming the same","description":"A method of forming a semiconductor device structure is provided. The method includes forming a fin structure protruding from a substrate and forming a first liner layer to cover a top surface and a s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10522662","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10522662","citation_suggestion":"Patentable. \"FinFET device with T-shaped fin and method for forming the same\" (US-10522662). https://patentable.app/patents/US-10522662","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10522662","json":"https://patentable.app/api/llm-context/US-10522662","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:36:21.450Z"}