{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10526197","patent":{"patent_number":"US-10526197","title":"Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor","assignee":null,"inventors":[],"filing_date":"2017-09-05T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["G01C"],"num_claims":21,"abstract":"A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section; and a gap portion formed to have a predetermined gap between the movable section and the arm portion when viewed in the planar view, in which a ridge portion formed as an etching residue having a top portion on the side facing the gap portion is provided on each of facing surfaces of the movable section and the arm portion in the gap portion, and the predetermined gap is a gap between a top portion of a first ridge portion which is the ridge portion formed at one of the movable section and the arm portion, and a top portion of a second ridge portion which is the ridge portion formed at the other of the movable section and the arm portion."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor","description":"A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10526197","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10526197","citation_suggestion":"Patentable. \"Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor\" (US-10526197). https://patentable.app/patents/US-10526197","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10526197","json":"https://patentable.app/api/llm-context/US-10526197","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:23:32.565Z"}