{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10527556","patent":{"patent_number":"US-10527556","title":"Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same","assignee":null,"inventors":[],"filing_date":"2017-10-27T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["G01N","G01N","G06T","H01L","G01N","G01N","G06T"],"num_claims":17,"abstract":"An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an opening is formed, and detecting light reflected from the substrate to obtain an image of a bottom surface of the opening."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same","description":"An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10527556","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10527556","citation_suggestion":"Patentable. \"Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same\" (US-10527556). https://patentable.app/patents/US-10527556","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10527556","json":"https://patentable.app/api/llm-context/US-10527556","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:31:08.628Z"}