{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10529565","patent":{"patent_number":"US-10529565","title":"Method of forming amorphous silicon layer","assignee":null,"inventors":[],"filing_date":"2018-11-23T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":9,"abstract":"Provided is a method of forming an amorphous silicon layer, the method including supplying a reaction gas and an inert gas onto a substrate having an underlayer thereon, and stabilizing the gases while power for generating plasma is not being applied to a chamber, depositing an amorphous silicon layer on the underlayer by using plasma of the reaction gas, which is generated by applying a high-frequency (HF) power of 500 W to 700 W and, at the same time, applying a low-frequency (LF) power lower than the HF power to the chamber, providing a purge gas into the chamber, and pumping the chamber."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming amorphous silicon layer","description":"Provided is a method of forming an amorphous silicon layer, the method including supplying a reaction gas and an inert gas onto a substrate having an underlayer thereon, and stabilizing the gases whil","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10529565","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10529565","citation_suggestion":"Patentable. \"Method of forming amorphous silicon layer\" (US-10529565). https://patentable.app/patents/US-10529565","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10529565","json":"https://patentable.app/api/llm-context/US-10529565","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:46:14.634Z"}